| ZEISS VAST XT gold |
Active scanning and multipoint sensor. Scanning measuring rate up to
200 points/s.
Variable measuring force(50-1000 mN) for data acquisition.
Maximum stylus length = 500 mm, maximum weight = 500 g including stylus
adapter; minimum stylus tip diameter = 0.5 mm. |
Length measurement error
MPE complies with
ISO 10360-2:2009 |
EO/E150 |
in μm |
1.8 + L/300 |
Repeatability range of EO
MPL complies with
ISO 10360-2:2009 |
RO |
in μm |
1.4 |
Scanning error
MPE complies with
ISO 10360-4:2000
Required measuring time MPT |
THP
τ |
in μm
in s |
2.5
68 |
Form measurement error
MPE for roundness complies with
ISO 12181(VD I/ VDE 2617 sheet 2.2) |
RONt(MZCI) |
in μm |
1.8 |
Single stylus form probing error
MPE complies with
ISO 10360-5:2000 |
PFTU |
in μm |
1.8 |
Multi-stylus form probing error
MPE complies with
ISO 10360-5:2010 |
PFTM |
in μm |
2.5 |
Multi-stylus dimension probing error
MPE complies with
ISO 10360-5:2010 |
PSTM |
in μm |
1.2 |
Multi-stylus location probing error
MPL complies with
ISO 10360-5:2010 |
PLTM |
in μm |
1.7 |
